高真空真空泵

Hybrid maglev turbopumps

Maglev hybrid turbomolecular pumps - 400 l/s to 2100 l/s - for SC, coating and other industrial applications ATH-M Series

New hybrid turbomolecular pump ATH 500 M

. Mid-size maglev hybrid turbomolecular pump ATH 2303 M

New Maglev hybrid turbomolecular pump - specifically designed for Photovoltaic applications ATH 3200 M

Maglev turbo molecular pump - for enhanced light gas pumping ATP 2300M

Ball Bearing hybrid pumps

Hybrid turbomolecular pumps - 30 l/s to 300 l/s - for high vacuum applications ATH Series

Turbomolecular pumps - 80 l/s to 900 l/s - for industrial applications ATP Series

Molecular drag pumps

Molecular Drag Pumps - 7.5 l/s - for robust pumping solutions until 10-5 mbar MDP 5011