The A3P range has been specifically designed to reduce operating costs.

Covering a wide range of pumping speed from 100 m3/h to 1000 m3/h, the A3P range responds to every 300 mm medium process vacuum requirement at the lowest utilities cost.

Up to 50% power concumption reduction compared to conventional pumping solutions, one of the lowest water cooling flow and reduced N2 purge are some of the main key features. And all of this with up to 50% footprint reduction !

Features:

• Low utilities costs: only 1.5 kW for a 1000 m3/h pump
• Compact design: only 310 mm wide
• Multi-stage roots technology
• Corrosion resistant
• Low noise
• Low vibration
• Semi S2-0706 compliant

Key Benefits:

• Reduced cost of ownership
• Low footprint, save space in fab basement
• High reliability
• Semiconductor fab rules compliant

Applications:

• Etch (oxide, Poly)
• RTP
• Strip / Ashing
• Implant source