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乾式真空泵

Based on mastered multi-stage roots technology, Alcatel Vacuum Technology provides a wide range of dry pumps covering all the requirements of 200mm & 300mm Front-End and Back-End applications.

?Light processes: Load Lock, Transfer, Sputtering, PVD, Metrology?
?Medium processes: Etching, Implant, Stripping, RTP...
?Harsh processes: CVDs...