Electron microscopy :
Electron microscopes play a major role in quality control, forensic investigation and biological research.
Microscopes such as SEM, TEM and FIB SEM use electrons to create an image, requiring extremely high vacuum, low vibration and quiet vacuum pumps.
Alcatel Vacuum has developed a variety of high vacuum and primary pumps for this application :
The unique small dry ACP Series 2 pumps provide constant performance over time and particle-free operation. Pumping speed range from 15m3/h to 40m3/h.
The small, dry AMD series diaphragm pumps offer speeds from 1m3/h to 4m3/h.
Oil-lubricated Pascal series rotary vane pumps offer pumping speeds from 2m3/h to 21m3/h.
ATH series hybrid turbo-molecular pumps provide high compression ratio for light gas and pumping speeds from 30l/s to 300l/s.
The ASM 142 Series helium leak detectors are ideal for verification of the tightness of equipment.
Pressure measurement & control: Vacuum Gauges series 2000.
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