Dry pumps for fast evacuation of large volumes

ADKL range: fast evacuation of large volumes

Alcatel Vacuum Technology has developed products dedicated to semiconductor applications for more than 15 years. As a result, Alcatel capitalizes on this experience to introduce a new high capacity dry pump range.

These pumps are able to meet the most stringent needs of L/L evacuation on FPD, Solar or Industrial applications.
Depending on required pumping speed, 2 versions are available: AD30KL and AD70KL.

Key features

• High pumping speed (unique automatic boost mode)
• Low footprint
• Low CoO
  o  reduced power consumption : automatic standby mode
  o  low cooling water requirements
  o  no need for N2 purge
  o Energy saving option : save power !

The ADKL range has been specifically designed to reduce operating costs.

Up to 50% power consumption reduction compared to conventional pumping solutions, one of the lowest water cooling flow and no N2 purge are some of the main key features.

Fast pump down of large volumes

• AD30KL : 1 800 m3/h
       o 500 liters from ATM to 10-1 mbar, pump down time < 25 seconds
• AD70KL : 3 270 m3/h
       o 1 000 liters from ATM to 10-1 mbar, pump down time < 34 seconds

Applications: 

      • FPD big Load Locks chambers
      • Solar Manufacturing Load Locks
      • Fast evacuation of big volumes
      • Heavy Cycling applications