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Integrated Light duty Dry Pumps A100 Series](/tw-upload-photos/prod90/a100-series.jpg)
Integrated Light duty Dry Pumps
A100 Series
Since 1999, date of A100L introduction, the dry pump integration concept has become a standard in the Semiconductor industry. A100L is today installed in every 300mm Semiconductor plant in the world, providing recognized benefits to the key players of the industry.
Strong from this success, Alcatel Vacuum Technology has developed A100V, vertical profile dry pump with lower footprint. Based on the A100L design, A100V provides the same performances with a 35% footprint reduction, offering higher flexibility for on-tool integration.
Designed for Light Duty applications, the A100 Series is a standard for Semiconductor Load Locks & Transfer chambers. Its key features (clean vacuum, low noise, low vibration) make it also the best solution for any other non corrosive applications.
Applications :
• Load-locks
• Transfer chambers
• PVD
• SEM
• Preclean chambers
• Anneal chambers
Strong from this success, Alcatel Vacuum Technology has developed A100V, vertical profile dry pump with lower footprint. Based on the A100L design, A100V provides the same performances with a 35% footprint reduction, offering higher flexibility for on-tool integration.
Designed for Light Duty applications, the A100 Series is a standard for Semiconductor Load Locks & Transfer chambers. Its key features (clean vacuum, low noise, low vibration) make it also the best solution for any other non corrosive applications.
Applications :
• Load-locks
• Transfer chambers
• PVD
• SEM
• Preclean chambers
• Anneal chambers
