高真空真空泵
|
Hybrid maglev turbopumps
|
|
 |
New hybrid turbomolecular pump
ATH 500 M |
 |
Maglev hybrid turbomolecular pumps- 400 l/s to 2100 l/s - for SC, coating and other industrial applications ATH-M Series |
 |
New Maglev hybrid turbomolecular pump- specifically designed for Photovoltaic applications ATH 3200 M |
 |
Maglev turbo molecular pump- for enhanced light gas pumping ATP 2300M |
|
