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Turbomolecular pumps ATP Series](/tw-upload-photos/prod20/atp-series.jpg)
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Turbomolecular pumps
ATP Series
A version for each application
The ATP series offering provides pumping speeds from 80 to 900 l/s and low ultimate pressure.
Three versions:
• Standard
• ”C” for corrosive applications
• ”HPC” for high pressure corrosive applications
The inverted dynamic seal
The ”C” and ”HPC” incorporate an inverted dynamic seal. This unique feature improves the effectiveness of the gas purge in corrosive applications. In addition the “HPC” version can be heated to 65°C to prevent condensation.
ACT controllers: multiple interfacing capabilities
The ACT controllers optimize the control and monitoring of the ATP pumps. Provided with a large number of interfacing capabilities, the ACT controllers are easy to integrate.
Features
• High internal conductance
• Low rotational speed
• Large internal clearances
Benefits
• Avoid by-passing the high vacuum pumps
• Robust against accidental events (air inrush, shock,…)
• Less sensitive to solid particules (deposition, pollution,…)
Applications
• High vacuum
• Space simulation
• Deposition
• Particle accelerators
• General physics experiments
• Ion sources
• Surface analyzer
• Load-lock pumping
• Electron microscopes
• RIE
• Physical Vapor Deposition
• Ion implantation
The ATP series offering provides pumping speeds from 80 to 900 l/s and low ultimate pressure.
Three versions:
• Standard
• ”C” for corrosive applications
• ”HPC” for high pressure corrosive applications
The inverted dynamic seal
The ”C” and ”HPC” incorporate an inverted dynamic seal. This unique feature improves the effectiveness of the gas purge in corrosive applications. In addition the “HPC” version can be heated to 65°C to prevent condensation.
ACT controllers: multiple interfacing capabilities
The ACT controllers optimize the control and monitoring of the ATP pumps. Provided with a large number of interfacing capabilities, the ACT controllers are easy to integrate.
Features
• High internal conductance
• Low rotational speed
• Large internal clearances
Benefits
• Avoid by-passing the high vacuum pumps
• Robust against accidental events (air inrush, shock,…)
• Less sensitive to solid particules (deposition, pollution,…)
Applications
• High vacuum
• Space simulation
• Deposition
• Particle accelerators
• General physics experiments
• Ion sources
• Surface analyzer
• Load-lock pumping
• Electron microscopes
• RIE
• Physical Vapor Deposition
• Ion implantation
