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Plug and Play Tool Pumping Systems ATPS 1](/tw-upload-photos/prod15/atps-1.jpg)
Plug and Play Tool Pumping Systems
ATPS 1
Using a new technology :
Alcatel took the benefit of the
IPUP A100, jointly developed and qualified with Applied Materials, to design a modular tool pumping system able to meet the need of most tools and applications. 100 or 600 m3/h independent pumping lines combinations are available.
This new range is composed of 3 versions: ATPS 61, ATPS 81, ATPS 101 according of the pumping line configuration.
Increase safety :
& lower noise level
?Single exhaustable enclosure for all pumps including pump outlet connections.
?Noise level for 6 pumping lines comparable to 2 conventional pumps.
High performance & reliability :
?Pumping speed and ultimate vacuum are similar to corresponding conventional pumps.
?The A100 reliability has been field proven on a large installed base, as well as the 600 m3/h Roots blower.
Faster hook-up :
The centralized utilities and fully defined vacuum connection locations results in significant reduction in installation and start-up time.
Save footprint :
for a lot of applications
?Between 30 and 50 % footprint gain when compared to stacked conventional pumps with same pumping capacity.
?A wide range of applications are covered, including oxide, poly and metal Etch, W CVD, Ti/TiN CVD, undoped silicon oxide CVD (HDPCVD, RTP-CVD,? ?br>
For 6 to 12?fabs :
The Alcatel ATPS series provides the ultimate solution for gaining or saving space in existing or new fabs needing a remote pumping configuration.
Alcatel took the benefit of the
IPUP A100, jointly developed and qualified with Applied Materials, to design a modular tool pumping system able to meet the need of most tools and applications. 100 or 600 m3/h independent pumping lines combinations are available.
This new range is composed of 3 versions: ATPS 61, ATPS 81, ATPS 101 according of the pumping line configuration.
Increase safety :
& lower noise level
?Single exhaustable enclosure for all pumps including pump outlet connections.
?Noise level for 6 pumping lines comparable to 2 conventional pumps.
High performance & reliability :
?Pumping speed and ultimate vacuum are similar to corresponding conventional pumps.
?The A100 reliability has been field proven on a large installed base, as well as the 600 m3/h Roots blower.
Faster hook-up :
The centralized utilities and fully defined vacuum connection locations results in significant reduction in installation and start-up time.
Save footprint :
for a lot of applications
?Between 30 and 50 % footprint gain when compared to stacked conventional pumps with same pumping capacity.
?A wide range of applications are covered, including oxide, poly and metal Etch, W CVD, Ti/TiN CVD, undoped silicon oxide CVD (HDPCVD, RTP-CVD,? ?br>
For 6 to 12?fabs :
The Alcatel ATPS series provides the ultimate solution for gaining or saving space in existing or new fabs needing a remote pumping configuration.
