污染管理解決方案
|
Airborne Molecular contamination (AMC) control
|
|
![]() |
Molecular contamination monitoring tool for carriers and substrates
Adixen Pod Analyser (APA) |
Molecular decontamination solution
Molecular decontamination and protection for carriers and substrates
Adixen Pod Regenerator (APR) |
Equipment contamination control tool
![]() |
Equipment Contamination Control Tool
Exhaust Pressure Control (EPC) |
Modelisation
![]() |
Modelisation
Simulation Expertise |
|



