Alcatel-lucent Japan, representing Alcatel Vacuum Technology France, has released their AMC (Airborne Molecular Contamination) analyzer inside of wafer carrier pod (APA, Adixen POD Analyser).  It's the first in the world to probe inside of FOUP for AMC analysis. The new development which has improved the detection sensibility of the gas analyser in the new version APA v.2008, and it is available for the domestic market today.

APA takes the gas sampling from the POD and uses its characteristics of the molecular ionization to analyze the concentration of the gas down to ppbv level. It measures gas molecules such as Acid, Amine, VOC, or humidity (water vapor), which corresponds to residual process gas and airborne molecular gas. APA vers.2008 has its measurement purpose to understand the total amount of the acid or amine in the cleanroom environment. The detection precision is from 0.1 ppbv up to 50 ppbv, which has factor of 10 in low detection limit compared to the previous model.

The measurement method is to probe the gas inside of the POD via breezing hole with the patented specific interface. The sampling amount is less than 2 liters per measurement and the measurement time is 2 minutes. This short measurement time enables the on-site measurement in the fab process lines. By exchanging the interface, it is possible to measure any POD’s such as FOUPs, 200 mm SMIF, RSP, or open carriers.

Today’s technological trend with nano-meter range manufacturing drives the importance of the environment control for the wafers and masks.  On the other hand, there was no method which enabled to measure the interior of the FOUP or RSP (Reticle Smif POD) in real time. APA has getting a strong attention for its unique solution to measure and anlyse inside of the mini-environment for the AMC in real time.

APA vers.2008 has already proven its functionality and benefits in European fabs and it is now being installed in the European production lines.  In Japan, evaluations and user’s site as well as the sales is starting in June 2008.

This product is being distributed by Sojitz Machinary Japan since the September 2007.  APA, issued from the expertise of the vacuum technology know-hows,  will add the force in the marketing share to the core vacuum pump business of the Alcatel Vacuum technology France.  It will position the Alcatel Vacuum Technology in the stronger place in the semiconductor market.