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Alcatel Vacuum Technology corporate

Semiconductor Industry

Instrumentation, R&D, industries

Quality and environment

Support & Service

Deep Plasma Etching and PECVD Systems

產品

真空技術

粗真空真空泵

- Oil lubricated Roots Pumping system:Oil lubricated Roots Pumping System

- Small Dry Roughing Pumps:ACP Series 2

- General purpose dry pumps:ACP 120 Series

- Mechanical Diaphragm Pumps:AMD Series

- Rotary Vane Pumps:PASCAL Series

- Roots vacuum pumps:RSV Series

- Roots pumping systems:Roots pumping systems

- Dry roughing pumps:ACP Series

製程用乾式真空泵

- Multi-process dry pumps:ADP/ADS Series Two

- Low power consumption process pumps:A3P Range

- Dry pumps for fast evacuation of harsh process:ADKH range

- Dry pumps for fast evacuation of medium process:ADKP range

- Large dry pumps for harsh process:AD3KH

Load_lock 用乾式真空泵

- Integrated Light duty Dry Pumps:A100 Series

- Integrated Light Process Dry Pumps:A100L

- Compact multi-process dry pumps:A300 Series

- Dry pumps for fast evacuation of large volumes:ADKL range

- Compact multi-process dry pumps:A100 Series

乾式真空泵系統

- Plug and Play Tool Pumping Systems:ATPS 2

- Plug and Play Tool Pumping Systems:ATPS 1

乾式真空泵配件

- Accessories - Traps:Traps

- Accessories - APMS:APMS

污染管理解決方案

- Introduction:Adixen Advanced Systems

- Molecular contamination monitoring tool for carriers and substrates:Adixen Pod Analyser (APA)

- Molecular decontamination and protection for carriers and substrates:Adixen Pod Regenerator (APR)

- Equipment Contamination Control Tool:Exhaust Pressure Control (EPC)

- Modelisation:Simulation Expertise

高真空真空泵

- New hybrid turbomolecular pump:ATH 500 M

- Hybrid turbomolecular pumps:ATH Series

- Turbomolecular pumps:ATP Series

- Molecular Drag Pumps:MDP 5011

- Maglev hybrid turbomolecular pumps:ATH-M Series

- New Maglev hybrid turbomolecular pump:ATH 3200 M

- Maglev turbo molecular pump:ATP 2300M

渦輪分子真空泵系

- Compact dry pumping systems:Drytel Series

- Turbomolecular pumping systems:Turbomolecular pumping systems

- Compact turbomolecular pumping systems:Packtel 1025

真空儀器

- Vacuum Measurement:2000 series Vacuum Gauges

- Moisture monitoring system for freeze-drying:Lyotrack

真空配件

- Vacuum Valves:Vacuum Valves

- Vacuum Components:Flanges & Fittings

測漏儀

氦氣測漏儀

- Helium Leak Detectors:Helium Leak Detection

- Multipurpose Helium Leak Detectors - ASM Graph Series:ASM Graph Series

- Portable Helium Leak Detector:ASM 310

- Multipurpose Helium Leak Detectors:ASM 142 Series

- High Performance Helium Leak Detectors:ASM 182-192 Series

- Portable Dry Sniffing Helium Leak Detectors:ASM 102S

- Portable Dry Helium Leak Detectors:ASM 122 D

- Integrable Industrial Helium Leak Detectors:ASI 20 MD

- Helium Leak Detection Workstations:ASM 1002

- General purpose accessories:General purpose accessories

- Seal package leak detectors:SIMS 1282+

- Portable sniffing leak detector:ASM 100HDS

- High performance dry leak detector:ASM 192T2D+

- Helium Leak Detection Techniques:Helium Leak Detection Techniques

真空計

- Measurement:Vacuum Measurement

- Vacuum Measurement:Vacuum Gauges

氫氣測漏儀

- EX- approved Leak Detector:EXTRIMA

- Accessories � Complete Gas Injection Kit to Extrima:Complete Gas Injection Kit

- Tracer Gas Controller:ILS500-F

- Hydrogen Leak Detectors Introduction:Hydrogen Leak Detectors Introduction

- Industrial Leak Detector:H2000 PLUS

- Industrial Leak Locator:H1000

- Leak Detection System:ILS500

- Utility Leak Detector:9012 XRS

- Tracer Gas Controller:ILS 500-F

- Accessories - probes:H2000-Accessories

- Accessories - probes:9012 XRS - Accessories

- Tracer Gas Filler:TGF10

- Calibration of Hydrogen Leak Detector:Reference Leaks

先進系統

文章

- XPS analysis:XPS analysis with an ultra-clean vacuum substrate carrier

- AMC new version:AMC new version

市場與應用

真空技術專家

分析儀器及研究

- 分析儀器 : Mass spectrometry

- 分析儀器 : Electron microscopy

- 分析儀器 : Surface area analysis

- 分析儀器 : Magnetic Resonance Imaging (MRI) / Nuclear Magnetic Resonance (NMR)

- 分析儀器 : Optical spectrometry

- 研發 : Particle accelerators

- 研發 : Laboratories & universities

- 研發 : Space / experimental chambers

鍍膜

- 大面積鍍膜 : Architectural glass coating

- 大面積鍍膜 : Metal strip coating

- 小面積鍍膜 : Data storage

- 小面積鍍膜 : Tool and/or decorative Coating

- 小面積鍍膜 : Optical coating

半導體

- 乾式真空泵 : Light process

- 乾式真空泵 : Medium process

- 乾式真空泵 : Harsh process

- 製程氣體捕捉器 : Adixen Trap Solutions

- 測漏儀 : Helium leak detectors

- 測漏儀 : Hydrogen leak detectors

- 磁浮式渦輪分子泵 : Stand-alone products

- 磁浮式渦輪分子泵 : Embedded products

- 磁浮式渦輪分子泵 : CMS (Control Monitoring System)

- 監測系統 : APMS

- 監測系統 : APS 500

- 監測系統 : CMS

- 真空計及真空閥 : Vacuum valves

- 先進系統 : Advanced Systems

平面顯式及光電

- 乾式真空泵 : Light process

- 乾式真空泵 : Medium process

- 乾式真空泵 : Harsh process

- 磁浮式渦輪分子泵 : Embedded products

- 磁浮式渦輪分子泵 : Stand-alone products

- 磁浮式渦輪分子泵 : CMS (Control Monitoring System)

- 氦氣測漏儀 : Dry leak detectors

- 氦氣測漏儀 : Conventional leak detectors

醫療與製藥

- 醫療 : Plasma sterilization

- 醫療 : Vacuum autoclave sterilizer

- 醫療 : High speed centrifuge

- 醫療 : Implants

- 醫療 : MRI / Radio-therapy/radio-pharmacy

- 醫療 : Radio Surgery

- 製藥 : Freeze-drying

- 製藥 : Drug Packaging

工業

- 汽車 : Circuit filling

- 燈泡工業 : Lamp manufacturing

- 空調冷凍機 : Filling and draining

- 真空管 : Electron tubes

- 氣體工業 : Cleaning and filling

- 電漿清潔 : Surface treatment and cleaning

測漏專家

汽車

- Automotive Components

- Safety components

冷凍

- Refrigeration components

- Final assembly test

空調

- Components integrity tests

- Final assembly test

運輸空調

- Component integrity tests

- Final assembly test

發電

- Power generation

電器元件

- Integrity test

包裝

- Packaging

液體及氣體運輸

- Commissioning & maintenance

加壓電纜

- Maintenance of pressurized telecom cables

航太

- Manufacturing & maintenance

加熱系統

- Integrity & safety test

氣體工業

- Compressed gas containers test

石油化學

- Manufacturing / transportation/ storage

氫能源

- Energy transportation

工業

- Industrial components

醫療

- Medical devices

客戶支持與服務

About Us

Markets served

Repair & Remanufacturing

Spare parts and Product solutions

Service Portfolio

Measurement and Calibration

Quality and Security Environment

RoHS and WEEE

Safety Return Questionnaire

Hotline

環境,健康與安全

環境,健康與安全

Introduction

Commitment to the Environment

Commitment to Health

Commitment to Safety

Emergency Response Team

Oils & greases safety data sheet

物質安全資料表

Compressed gases, n.o.s.

資料庫

圖庫

廣告橫幅及按鈕

常見問題

Leak Testing

Telecom

Water

友善連結

DIRECTORY - Vacuum Guide

DIRECTORY - Semiconductor Manufacturing

ORGANISATION - JEMI France

詞彙表

如何連繫我們?

測漏

公告欄

新聞

一般新聞

- 24th European PV Conference

- New ATH 500M

- Paris Air Show 2009

- Semicon China 2009

- Photon Munich 4-6th March 2009

- Screensaver from Adixen by Alcatel Vacuum Technology

- Greeting card 2009 from Alcatel Vacuum Technology

- New ADK big dry mumps

- Semicon Europa 2008

- VTE exhibition-Milan, Italy

- Semicon Taiwan 2008

- Adixen new Capabilities Brochure

- Adixen products in the pharmaceutical industry

真空技術

- Our new subsidiary in China, Alcatel Vacuum Technology Shanghai

- Vapor Pumping with ACPs

- Airborne Molecular Contamination Detection Method for decontamination

- Lyotrack has the best sensitivity to determine drying endpoint times

- A new success for Lyotrack !

- New Vacuum Gauges

- A3P Dry vacuum pumps range for Medium applications

- New Dry Pump A100V

- ATP 2300 M

- Greeting card from Adixen by Alcatel Vacuum Technology

- Adixen : The New Brand Name for Success

- Adixen Animation

- 特惠期間

- 具有革命性意義的完全定點式幫浦

- 製程腔體壓力控制：蝕刻與沉積的新概念

- 新型阿爾卡特乾式幫浦將會提供高度無塵工作環境

- 阿爾卡特真空科技是阿爾卡特SA完全控股的子公司

- 阿爾卡特真空技術部與歐洲

測漏儀

- Our new subsidiary in China, Alcatel Vacuum Technology Shanghai

- ASM310 video

- Article : Helium—High Cost, Limited Supply: The Facts and Solutions f

- New Portable Helium Leak Detector ASM 310 : 21 kg !

- Hydrogen leak detection for Semiconductor applications

- AMG12

- Helium leak detection - ASM 1002

- ASM Graph series : The new interface operator generation

- Greeting card from Adixen by Alcatel Vacuum Technology

- Adixen : The New Brand Name for Success

- Adixen Animation

- ASM142D：乾式ASM142

- 特惠期間

- 阿爾卡特真空科技是阿爾卡特SA完全控股的子公司

- 阿爾卡特真空技術部與歐洲

新聞公告

真空技術

- January 2005: Successful Introduction of AMS 100 𨧻-Speeder

- 2001年9月：阿爾卡特微加工系統在美國波士頓成立新的北美應用實驗室

- 阿爾卡特對半導體工業的貢獻：阿爾卡特促進了半導體業的繁榮

- Alcatel Vacuum Technology has received a 'Supplier Excellence Award' from LAM Research for the second consecutive year.

- Adixen guarantees secure freeze-drying.

- The new Adixen 2000 range of gauges revolutionizes vacuum measurement.

- ATH200新式混合型渦輪式幫浦—適用於分析型儀器

- ATH 200 New hybrid turbomolecular pump for analytical instrumentation

- Pascal系列，專業的油迴轉式和附件

- The Adixen A300 by Alcatel Vacuum Technology "New dry pump"

- 阿爾卡特CPM Etch 2610 2001年最佳產品

- * IPUP-AMAT同阿爾卡特聯合生產的通用低真空幫浦

- 阿爾卡特IPUP常見問答

- 綜合考慮用戶觀點，全面革新的阿爾卡特幫浦能夠大幅節約成本，節約能源

- 阿爾卡特ATH 2300M簡介：小型全磁浮渦輪幫浦

- ATPS 阿爾卡特新型即插即用工具抽氣系統，可以大幅削減佔地面積

- 阿爾卡特在研發和工業上的新成果：新型的真空產品，增強了阿爾卡特市場競爭力

- 阿爾卡特ATH / M系列應用於半導體領域的全磁浮渦輪幫浦

- 阿爾卡特渦輪分子幫浦ATP系列集可靠性與堅實性於一體

- 魯式真空幫浦與抽氣系統

- Drytel 1025：緊湊型乾式抽氣系統

- ACP 28系列在小型乾式幫浦中的最終產品

- ATH 1600M簡介：一種微型全磁浮渦輪幫浦

- 阿爾卡特乾式幫浦： ADP/ADS系列2

測漏儀

- January 2005: Successful Introduction of AMS 100 𨧻-Speeder

- 2001年9月：阿爾卡特微加工系統在美國波士頓成立新的北美應用實驗室

- 阿爾卡特對半導體工業的貢獻：阿爾卡特促進了半導體業的繁榮

- Alcatel Vacuum Technology launches its Adixen Sensistor hydrogen leak detection system: H2000 PLUS.

- ASM 192 T2D+：功能最為強大的控制台型乾式測漏儀

- ASM 142D：專用乾燥設備

- ASM 182 TD+ 高性能乾式測漏儀

- ASI 20 MD 模塊化測漏儀

- ASM 180系列緊湊型和控制台型測漏儀

- DGC 1001 氦測漏儀工作台

- 阿爾卡特推出一種新型測漏儀ASM 142，為通用設備提出了新的性能標準

- ASM 180TD+ 阿爾卡特推出的市場上功能最強大的緊湊型乾燥測漏儀

- ASM 122D 便攜式乾燥測漏儀阿爾卡特便攜式乾燥測漏儀是市場上功能最為強大的

先進系統

- XPS Analysis

- Lyotrack : Humidity monitoring for freeze-drying application

最新技術發表

真空技術

- New methods and processes based on advanced vacuum technology

- Lyotrack has the best sensitivity to determine drying endpoint times

每月摘要

真空技術

- TIP OF THE MONTH 17 : Rotary vane pump

- TIP OF THE MONTH 16 : Rotary Vane Pumps and Oil Back-Diffusion

- TIP OF THE MONTH 12 : Pump out need

- TIP OF THE MONTH 11 : Vacuum technology catches drug-takers

- TIP OF THE MONTH 03

- TIP OF THE MONTH 05

- TIP OF THE MONTH 06

- TIP OF THE MONTH 07

測漏儀

- TIP OF THE MONTH 18 : Tests chambers

- TIP OF THE MONTH 15 : Wireless operation of leak detectors

- TIP OF THE MONTH 13 : Mass spectrometer in a helium leak detector

- TIP OF THE MONTH 10 : Lifetime of a calibrated leak

- TIP OF THE MONTH 02

- TIP OF THE MONTH 04

- TIP OF THE MONTH 08

- TIP OF THE MONTH 09

應用報告

Leak Testing Meets - New Semiconductor Industry Needs

Helium leak testing on long gas lines

Undetectable "virtual" leaks

Leak Testing Sealed Packages

Helium leak detection of glass coating equipment

New plug-and-play tool pumping and abatement system

Revolutionary Integrated Point-of-Use-Pump

New Dry Backing Pump Offers Ultra-Clean Operation

How to avoid vapour condensation in dry primary vacuum pumps

Past and present: milestones in development of

應用報告

技術

- Where is my leak?

- Does my product leak?

氣體

- The gas / Hydrogen

- The gas / Safety

- The gas / Environment

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